Copper electroplating method, pure copper anode for copper electroplating, and semiconductor wafer plated thereby with little particle adhesion

ABSTRACT

The present invention pertains to an electrolytic copper plating method characterized in employing pure copper as the anode upon performing electrolytic copper plating, and performing electrolytic copper plating with the pure copper anode having a crystal grain diameter of 10 μm or less or 60 μm or more or a non-recrystallized anode.  
     Provided are an electrolytic copper plating method and a pure copper anode for electrolytic copper plating used in such electrolytic copper plating method capable of suppressing the generation of particles such as sludge produced on the anode side within the plating bath upon performing electrolytic copper plating, and capable of preventing the adhesion of particles to a semiconductor wafer, as well as a semiconductor wafer plated with the foregoing method and anode having low particle adhesion.

TECHNICAL FIELD

[0001] The present invention pertains to an electrolytic copper plating method and a pure copper anode used in such electrolytic copper plating method capable of suppressing the generation of particles such as sludge produced on the anode side within the plating bath upon performing electrolytic copper plating, and in particular capable of preventing the adhesion of particles to a semiconductor wafer, as well as to a semiconductor wafer having low particle adhesion plated with the foregoing method and anode.

BACKGROUND ART

[0002] Generally, although an electrolytic copper plate has been employed for forming copper wiring in a PWB (print wiring board) or the like, in recent years, it is being used for forming copper wiring of semiconductors. An electrolytic copper plate has a long history, and it has reached its present form upon accumulating numerous technical advancements. Nevertheless, when employing this electrolytic copper plate for forming copper wiring of semiconductors, a new problem arose which was not found in a PWB.

[0003] Ordinarily, when performing electrolytic copper plating, phosphorous copper is used as the anode. This is because when an insoluble anode formed from the likes of platinum, titanium, or iridium oxide is used, the additive within the plating liquid would decompose upon being affected by anodic oxidization, and inferior plating will occur thereby. Moreover, when employing electrolytic copper or oxygen-free copper of a soluble anode, a large amount of particles such as sludge is generated from metallic copper or copper oxide caused by the dismutation reaction of monovalent copper during dissolution, and the plating object will become contaminated as a result thereof.

[0004] On the other hand, when employing a phosphorous copper anode, a black film composed of phosphorous copper or copper chloride is formed on the anode surface due to electrolysis, and it is thereby possible to suppress the generation of metallic copper or copper oxide caused by the dismutation reaction of monovalent copper, and to control the generation of particles.

[0005] Nevertheless, even upon employing phosphorous copper as the anode as described above, it is not possible to completely control the generation of particles since metallic copper or copper oxide is produced where the black film drops off or at portions where the black film is thin.

[0006] In light of the above, a filter cloth referred to as an anode bag is ordinarily used to wrap the anode so as to prevent particles from reaching the plating liquid.

[0007] Nevertheless, when this kind of method is employed, particularly in the plating of a semiconductor wafer, there is a problem in that minute particles, which were not a problem in forming the wiring of a PWB and the like, reach the semiconductor wafer, such particles adhere to the semiconductor, and thereby cause inferior plating.

[0008] As a result, when employing phosphorous copper as the anode, it became possible to significantly suppress the generation of particles by adjusting the phosphorous content, which is a component of phosphorous copper, electroplating conditions such as the current density, crystal grain diameter and so on.

[0009] Nevertheless, when the phosphorous copper anode dissolves, since phosphorous elutes simultaneously with copper in the solution, a new problem arose in that the plating solution became contaminated by the phosphorous. Although this phosphorous contamination occurred in the plating process of conventional PWB as well, as with the foregoing cases, it was not much of a problem. However, since the copper wiring of semiconductors and the like in particular disfavor eutectoid and inclusion of impurities, phosphorous accumulation in the solution was becoming a major problem.

DISCLOSURE OF THE INVENTION

[0010] The present invention aims to provide an electrolytic copper plating method and a pure copper anode used in such electrolytic copper plating method capable of suppressing the generation of particles such as sludge produced on the anode side within the plating bath upon performing electrolytic copper plating, without using phosphorous copper, and in particular capable of preventing the adhesion of particles to a semiconductor wafer, as well as to a semiconductor wafer having low particle adhesion plated with the foregoing method and anode.

[0011] In order to achieve the foregoing object, as a result of intense study, the present inventors discovered that a semiconductor wafer and the like having low particle adhesion can be manufactured stably by improving the electrode material, and suppressing the generation of particles in the anode.

[0012] Based on the foregoing discovery, the present invention provides:

[0013] 1. An electrolytic copper plating method characterized in employing pure copper as the anode upon performing electrolytic copper plating, and performing electrolytic copper plating with the pure copper anode having a crystal grain diameter of 10 μm or less or 60 μm or more or a non-recrystallized anode.

[0014] 2. An electrolytic copper plating method characterized in employing pure copper as the anode upon performing electrolytic copper plating, and performing electrolytic copper plating with the pure copper anode having a crystal grain diameter of 5 μm or less or 100 μm or more or a non-recrystallized anode.

[0015] 3. An electrolytic copper plating method according to paragraph 1 or paragraph 2 above, characterized in using pure copper having a purity of 2N (99 wt %) or higher, excluding gas components, as the anode.

[0016] 4. An electrolytic copper plating method according to paragraph 1 or paragraph 2 above, characterized in using pure copper having a purity of 3N (99.9 wt %) to 6N (99.9999 wt %), excluding gas components, as the anode.

[0017] 5. An electrolytic copper plating method according to each of paragraphs 1 to 4 above, characterized in using pure copper having an oxygen content of 500 to 15000 ppm as the anode.

[0018] 6. An electrolytic copper plating method according to each of paragraphs 1 to 4 above, characterized in using pure copper having an oxygen content of 1000 to 10000 ppm as the anode.

[0019] 7. A pure copper anode for performing electrolytic copper plating characterized in that the anode is used for performing electrolytic copper plating, pure copper is used as the anode, and the crystal grain diameter of the pure anode is 10 μm or less or 60 μm or more or non-recrystallized.

[0020] 8. A pure copper anode for performing electrolytic copper plating, characterized in that the anode is used for performing electrolytic copper plating, pure copper is used as the anode, and the crystal grain diameter of the pure anode is 5 μm or less or 100 μm or more or non-recrystallized.

[0021] 9. A pure copper anode for electrolytic copper plating according to paragraph 7 or paragraph 8 above, characterized in having a purity of 2N (99 wt %) or higher, excluding gas components.

[0022] 10. A pure copper anode for electrolytic copper plating according to paragraph 7 or paragraph 8 above, characterized in having a purity of 3N (99.9 wt %) to 6N (99.9999 wt %), excluding gas components.

[0023] 11. A pure copper anode for electrolytic copper plating according to each of paragraphs 7 to 10 above, characterized in that the anode is used for performing electrolytic copper plating, and having an oxygen content of 500 to 15000 ppm.

[0024] 12. A pure copper anode for electrolytic copper plating according to each of paragraphs 7 to 10 above, characterized in that the anode is used for performing electrolytic copper plating, and having an oxygen content of 1000 to 10000 ppm.

[0025] 13. An electrolytic copper plating method and a pure copper anode for electrolytic copper plating according to each of paragraphs 1 to 12 above, characterized in that the electrolytic copper plating is to be performed on a semiconductor wafer.

[0026] 14. A semiconductor wafer having low particle adhesion plated with the electrolytic copper plating method and the pure copper anode for electrolytic copper plating according to each of paragraphs 1 to 13 above.

BRIEF DESCRIPTION OF THE DRAWINGS

[0027]FIG. 1 is a conceptual diagram of a device used in the electrolytic copper plating method of a semiconductor wafer according to the present invention.

MODE FOR CARRYING OUT THE INVENTION

[0028]FIG. 1 is a diagram illustrating an example of the device employed in the electrolytic copper plating method of a semiconductor wafer. The copper plating device is equipped with the plating bath 1 containing copper sulfate plating liquid 2. A pure copper anode 4 is used as the anode, and, as the cathode, for example, a semiconductor wafer is used as the object of plating.

[0029] Conventionally, when employing pure copper as the anode upon performing electrolytic plating, it has been said that particles such as sludge composed of metallic copper or copper oxide caused by the dismutation reaction of monovalent copper during the dissolution of the anode would be generated.

[0030] Nevertheless, it has been discovered that the generation of particles in the anode could be suppressed by suitably controlling the particle size, purity, oxygen content and the like of the pure copper anode, and that the production of defective goods during the semiconductor manufacture process can be reduced by preventing the adhesion of particles to the semiconductor wafer.

[0031] Moreover, since a phosphorous copper anode is not used, there is a superior characteristic in that phosphorous will not accumulate in the plating bath, and phosphorous will therefore not contaminate the semiconductor.

[0032] Specifically, pure copper is employed as the anode, and electrolytic copper plating is performed with such pure copper anode having a crystal grain diameter of 10 μm or less or 60 μm or more or a non-recrystallized anode. If the crystal grain diameter of the pure copper anode exceeds 10 μm or is less than 60 μm, as indicated in the Examples and Comparative Examples described later, the generation of sludge will increase.

[0033] In a particularly preferable range, the crystal grain diameter is 5 μm or less or 100 μm or more or non-recrystallized. Moreover, non-recrystallized means a component having a processed structure obtained by performing processing such as rolling or casting to a cast structure, and which does not have a re-crystallized structure acquired by annealing.

[0034] With respect to purity, pure copper having a purity of 2N (99 wt %) or higher, excluding gas components, is used as the anode. Generally, pure copper having a purity of 3N (99.9%) to 6N (99.9999 wt %), excluding gas components, is used as the anode.

[0035] Further, employing pure copper having an oxygen content of 500 to 15000 ppm as the anode is desirable since the generation of sludge can be suppressed and particles can be reduced. In particular, regarding the copper oxide in the anode, dissolution of the anode is smoother in the form of CuO in comparison to Cu₂O, and the generation of sludge tends to be less. More preferably, the oxygen content is 1000 to 10000 ppm.

[0036] As a result of performing electrolytic copper plating with the pure copper anode of the present invention as described above, the generation of sludge or the like can be reduced significantly, and it is further possible to prevent particles from reaching the semiconductor wafer and causing inferior plating upon such particles adhering to the semiconductor wafer.

[0037] The electrolytic plate employing the pure copper anode of the present invention is particularly effective in the plating of a semiconductor wafer, but is also effective for copper plating in other sectors where fine lines are on the rise, and may be employed as an effective method for reducing the inferior ratio of plating caused by particles.

[0038] As described above, the pure copper anode of the present invention yields an effect of suppressing the irruption of particles such as sludge composed of metallic copper or copper oxide, and significantly reducing the contamination of the object to be plated, but does not cause the decomposition of additives within the plating liquid or inferior plating resulting therefrom which occurred during the use of insoluble anodes in the past.

[0039] As the plating liquid, an appropriate amount of copper sulfate: 10 to 70 g/L (Cu), sulfuric acid: 10 to 300 g/L, chlorine ion 20 to 100 mg/L, additive: (CC-1220: 1 mL/L or the like manufactured by Nikko Metal Plating) may be used. Moreover, it is desirable that the purity of the copper sulfate be 99.9% or higher.

[0040] In addition, it is desirable that the plating temperature is 15 to 40° C., cathode current density is 0.5 to 10 A/dm², and anode current density is 0.5 to 10 A/dm². Although the foregoing plating conditions represent preferable examples, it is not necessary to limit the present invention to the conditions described above.

EXAMPLES AND COMPARATIVE EXAMPLES

[0041] Next, the Examples of the present invention are explained. Further, these Examples are merely illustrative, and the present invention shall in no way be limited thereby. In other words, the present invention shall include all other modes or modifications other than these Examples within the scope of the technical spirit of this invention.

Examples 1 to 4

[0042] Pure copper having a purity of 4N to 5N was used as the anode, and a semiconductor wafer was used as the cathode. As shown in Table 2, with respect to the crystal grain size of these pure copper anodes, anodes adjusted respectively to 5 μm, 500 μm, non-recrystallized and 2000 μm were used.

[0043] Further, the oxygen content of each of the foregoing anodes was less than 10 ppm. The analysis of the 4N pure copper anode is shown in Table 1.

[0044] As the plating liquid, copper sulfate: 50 g/L (Cu), sulfuric acid: 10 g/L, chlorine ion 60 mg/L, additive [brightening agent, surface active agent] (Product Name CC-1220: manufactured by Nikko Metal Plating): 1 mL/L were used. The purity of the copper sulfate within the plating liquid was 99.99%.

[0045] The plating conditions were plating temperature 30° C., cathode current density 4.0 A/dm², anode current density 4.0 A/dm², and plating time 12 hr. The foregoing conditions and other conditions are shown in Table 2. TABLE 1 Analysis of 4N Pure Copper Anode Element Concentration ppm Li <0.001 Be <0.001 B <0.001 F <0.01 Na <0.01 Mg <0.001 Al 0.006 Si 0.06 P 0.24 S 11 Cl 0.02 K <0.01 Ca <0.005 Sc <0.001 Ti <0.001 V <0.001 Cr 0.06 Mn 0.02 Fe 0.54 Co 0.002 Ni 0.91 Cu Matrix Zn <0.05 Ga <0.01 Ge <0.005 As 0.21 Se 0.35 Br <0.05 Rb <0.001 Sr <0.001 Y <0.001 Zr <0.001 Nb <0.005 Mo 0.01 Ru <0.005 Rh <0.05 Pd <0.005 Ag 10 Cd <0.01 In <0.005 Sn 0.07 Sb 0.16 Te 0.14 I <0.005 Cs <0.005 Ba <0.001 La <0.001 Ce <0.001 Pr <0.001 Nd <0.001 Sm <0.001 Eu <0.001 Gd <0.001 Tb <0.001 Dy <0.001 Ho <0.001 Er <0.001 Tm <0.001 Yb <0.001 Lu <0.001 Hf <0.001 Ta <5 W <0.001 Re <0.001 Os <0.001 Ir <0.001 Pt <0.01 Au <0.01 Hg <0.01 Tl <0.001 Pb 0.71 Bi 0.11 Th <0.0001 U <0.0001 C <10 N <10 O <10 H <1

[0046] After the plating, the generation of particles, plate appearance and embeddability were observed. The results are similarly shown in Table 2.

[0047] Regarding the particle amount, after having performed electrolysis under the foregoing electrolytic conditions, the plating liquid was filtered with a filter of 0.2 μm, and the weight of the filtrate was measured thereby. Regarding the plate appearance, after having performed electrolysis under the foregoing electrolytic conditions, the object to be plated was exchanged, plating was conducted for 1 minute, and the existence of burns, clouding, swelling, abnormal deposition, foreign material adhesion and so on were observed visually. Regarding embeddability, the embeddability of the semiconductor wafer via having an aspect ratio of 5 (via diameter 0.2 μm) was observed in its cross section with an electronic microscope.

[0048] As a result of the foregoing experiments, the amount of particles was 3030 to 3857 mg in Examples 1 to 4, and the plate appearance and embeddability were favorable. TABLE 2 Examples 1 2 3 4 Anode Crystal Grain Size (μm) 5 μm 5000 μm Non-Recrystallized Product 2000 μm Purity 4N 4N 4N 5N Oxygen Content <10 ppm <10 ppm <10 ppm <10 ppm Plating Metallic Salt Copper Sulfate: Copper Sulfate: Copper Sulfate: 50 g/L (Cu) Copper Sulfate: Liquid 50 g/L (Cu) 50 g/L (Cu) 50 g/L (Cu) Acid Sulfuric Acid: 10 g/L Sulfuric Acid: 10 g/L Sulfuric Acid: 10 g/L Sulfuric Acid: 10 g/L Chlorine Ion (ppm) 60   60   60   60   Additive CC-1220:1 mL/L CC-1220:1 mL/L CC-1220:1 mL/L CC-1220:1 mL/L (Nikko Metal Plating) (Nikko Metal Plating) (Nikko Metal Plating) (Nikko Metal Plating) Electrolytic Bath Amount (mL) 700    700    700    700    Conditions Bath Temperature (° C.) 30   30   30   30   Cathode Semiconductor Wafer Semiconductor Wafer Semiconductor Wafer Semiconductor Wafer Cathode Area (dm²) 0.4 0.4 0.4 0.4 Anode Area (dm²) 0.4 0.4 0.4 0.4 Cathode Current Density (A/dm²) 4.0 4.0 4.0 4.0 Anode Current Density (A/dm²) 4.0 4.0 4.0 4.0 Time (h) 12   12   12   12   Evaluation Particle Amount (mg) 3857    3116    3030    3574    Results Plate Appearance Favorable Favorable Favorable Favorable Embeddability Favorable Favorable Favorable Favorable

Examples 5 and 6

[0049] As shown in Table 3, pure copper having a purity of 4N to 5N was used as the anode, and a semiconductor wafer was used as the cathode. The crystal grain size of these pure copper anodes was non-recrystallized and 2000 μm.

[0050] As the plating liquid, copper sulfate: 50 g/L (Cu), sulfuric acid: 10 g/L, chlorine ion 60 mg/L, additive [brightening agent, surface active agent] (Product Name CC-1220: manufactured by Nikko Metal Plating): 1 mL/L were used. The purity of the copper sulfate within the plating liquid was 99.99%.

[0051] The plating conditions were plating temperature 30° C., cathode current density 4.0 A/dm², anode current density 4.0 A/dm², and plating time 12 hr.

[0052] With the foregoing Examples 5 and 6, in particular, illustrated are examples in which the oxygen content was 4000 ppm, respectively. The foregoing conditions and other conditions are shown in Table 3.

[0053] After the plating, the generation of particles, plate appearance and embeddability were observed. The results are similarly shown in Table 3. Moreover, the observation of the amount of particles, plate appearance and embeddability was pursuant to the same method as with foregoing Examples 1 to 4.

[0054] As a result of the foregoing experiments, the amount of particles was 125 mg and 188 mg in Examples 5 and 6, and the plate appearance and embeddability were favorable. In particular, although the foregoing Examples contained a prescribed amount of oxygen as described above, even in comparison to Examples 1 to 4, the reduction in the amount of particles can be acknowledged.

[0055] Accordingly, it is evident that containing an adjusted amount of oxygen in the pure copper anode is effective in forming a stable plate coating without any particles. TABLE 3 Examples Comparative Examples 5 6 1 2 Anode Crystal Grain Size (μm) Non-Recrystallized Product 2000 μm 30 μm 30 μm Purity 4N 5N 4N 5N Oxygen Content 4000 ppm 4000 ppm <10 ppm <10 ppm Plating Metallic Salt Copper Sulfate: Copper Sulfate: Copper Sulfate: Copper Sulfate: Liquid 50 g/L (Cu) 50 g/L (Cu) 50 g/L (Cu) 50 g/L (Cu) Acid Sulfuric Acid: 10 g/L Sulfuric Acid: 10 g/L Sulfuric Acid: 10 g/L Sulfuric Acid: 10 g/L Chlorine Ion (ppm) 60   60   60   60   Additive CC-1220:1 mL/L CC-1220:1 mL/L CC-1220:1 mL/L CC-1220:1 mL/L (Nikko Metal Plating) (Nikko Metal Plating) (Nikko Metal Plating) (Nikko Metal Plating) Electrolytic Bath Amount (mL) 700    700    700    700    Conditions Bath Temperature (° C.) 30   30   30   30   Cathode Semiconductor Wafer Semiconductor Wafer Semiconductor Wafer Semiconductor Wafer Cathode Area (dm²) 0.4 0.4 0.4 0.4 Anode Area (dm²) 0.4 0.4 0.4 0.4 Cathode Current Density (A/dm²) 4.0 4.0 4.0 4.0 Anode Current Density (A/dm²) 4.0 4.0 4.0 4.0 Time (h) 12   12   12   12   Evaluation Particle Amount (mg) 125    188    6540    6955    Results Plate Appearance Favorable Favorable Unfavorable Unfavorable Embeddability Favorable Favorable Favorable Favorable

Comparative Example 1 and 2

[0056] As shown in Table 3, pure copper having a crystal grain diameter of 30 μm was used as the anode, and a semiconductor wafer was used as the cathode. Regarding the purity of these copper anodes, pure copper of 4N and 5N of the same level as the Examples was used. Moreover, each of the anodes used has an oxygen content of less than 10 ppm.

[0057] As the plating liquid, copper sulfate: 50 g/L (Cu), sulfuric acid: 10 g/L, chlorine ion 60 mg/L, additive [brightening agent, surface active agent] (Product Name CC-1220: manufactured by Nikko Metal Plating): 1 mL/L were used. The purity of the copper sulfate within the plating liquid was 99.99%.

[0058] The plating conditions were plating temperature 30° C., cathode current density 4.0 A/dm², anode current density 4.0 A/dm², and plating time 12 hr. The foregoing conditions and other conditions are shown in Table 3.

[0059] After the plating, the generation of particles, plate appearance and embeddability were observed. The results are similarly shown in Table 3.

[0060] Moreover, the observation of the amount of particles, plate appearance and embeddability was pursuant to the same method as with the foregoing Examples. As a result of the foregoing experiments, the amount of particles in Comparative Examples 1 and 2 reached 6540 to 6955 mg, and although the embeddability was favorable, the plate appearance was unfavorable.

[0061] Accordingly, it has been confirmed that the crystal grain size of the pure copper anode significantly influences the generation of particles, and, by adding oxygen thereto, the generation of particles can be further suppressed.

Effect of the Invention

[0062] The present invention yields a superior effect in that upon performing electrolytic plating, it is capable of suppressing the generation of particles such as sludge produced on the anode side within the plating bath, and capable of significantly preventing the adhesion of particles to a semiconductor wafer. 

1. An electrolytic copper plating method comprising the steps of employing pure copper as an anode for performing electrolytic copper plating, and performing electrolytic copper plating with said pure copper anode, said anode having a crystal grain diameter of less than 10 μm or 60 μm or more. 2-6. (canceled).
 7. An anode for performing electrolytic copper plating comprising a pure copper anode for use in performing electrolytic copper plating, said pure copper anode having a crystal grain diameter of less than 10 μm or 60 μm or more. 8-14. (canceled).
 15. An electrolytic copper plating method according to claim 1, wherein said crystal grain diameter of said pure copper anode is 5 μm or less or 100 μm or more.
 16. An electrolytic copper plating method according to claim 1, wherein said pure copper of said anode has a purity of 2N (99 wt %) or higher, excluding gas components.
 17. An electrolytic copper plating method according to claim 1, wherein said pure copper of said anode has a purity of 3N (99.9 wt %) to 6N (99.9999 wt %), excluding gas components.
 18. An electrolytic copper plating method according to claim 1, wherein said pure copper of said anode has an oxygen content of 500 to 15000 ppm.
 19. An electrolytic copper plating method according claim 1, wherein said pure copper of said anode has an oxygen content of 1000 to 10000 ppm.
 20. An electrolytic copper plating method according to claim 1, wherein said electrolytic copper plating is performed on a semiconductor wafer.
 21. An electrolytic copper plating method according to claim 15, wherein said pure copper of said anode has a purity of 2N (99 wt %) or higher, excluding gas components.
 22. An electrolytic copper plating method according to claim 21, wherein said pure copper of said anode has an oxygen content of 500 to 15000 ppm.
 23. An electrolytic copper plating method according to claim 15, wherein said pure copper of said anode has a purity of 3N (99.9 wt %) to 6N (99.9999 wt %), excluding gas components.
 24. An electrolytic copper plating method according claim 23, wherein said pure copper of said anode has an oxygen content of 1000 to 10000 ppm.
 25. An electrolytic copper plating method according to claim 24, wherein said electrolytic copper plating is performed on a semiconductor wafer.
 26. An anode according to claim 7, wherein said crystal grain diameter of said pure copper anode is 5 μm or less or 100 μm or more.
 27. An anode according to claim 7, wherein said pure copper of said anode has a purity of 2N (99 wt %) or higher, excluding gas components.
 28. An anode according to claim 27, wherein said pure copper of said anode has a purity of 3N (99.9 wt %) to 6N (99.9999 wt %), excluding gas components.
 29. An anode according to claim 7, wherein said pure copper of said anode has an oxygen content of 500 to 15000 ppm.
 30. An anode according to claim 7, wherein said pure copper of said anode has an oxygen content of 1000 to 10000 ppm.
 31. A semiconductor wafer having low particle adhesion produced by a process comprising the steps of employing pure copper as an anode for performing electrolytic copper plating, and performing electrolytic copper plating with said pure copper anode on a semiconductor wafer, said anode having a crystal grain diameter of less than 10 μm or 60 μm or more.
 32. A semiconductor wafer according to claim 31, wherein said crystal grain diameter of said pure copper anode is 5 μm or less or 100 μm or more. 